JPH037391Y2 - - Google Patents
Info
- Publication number
- JPH037391Y2 JPH037391Y2 JP17242184U JP17242184U JPH037391Y2 JP H037391 Y2 JPH037391 Y2 JP H037391Y2 JP 17242184 U JP17242184 U JP 17242184U JP 17242184 U JP17242184 U JP 17242184U JP H037391 Y2 JPH037391 Y2 JP H037391Y2
- Authority
- JP
- Japan
- Prior art keywords
- flat
- rotating
- recessed hole
- flat member
- plunger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17242184U JPH037391Y2 (en]) | 1984-11-15 | 1984-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17242184U JPH037391Y2 (en]) | 1984-11-15 | 1984-11-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6190854U JPS6190854U (en]) | 1986-06-12 |
| JPH037391Y2 true JPH037391Y2 (en]) | 1991-02-25 |
Family
ID=30730087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17242184U Expired JPH037391Y2 (en]) | 1984-11-15 | 1984-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037391Y2 (en]) |
-
1984
- 1984-11-15 JP JP17242184U patent/JPH037391Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6190854U (en]) | 1986-06-12 |
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